Title:
湾曲クレードルを使用してマイクロレンズアレイを貫通する開口を形成する方法及び装置、並びに、それによって製造される製品
Document Type and Number:
Japanese Patent JP2010505631
Kind Code:
A
Abstract:
Methods for creating apertures in a layer on a back side of a substrate that includes a microlens array on a front side thereof include curving the substrate into a cylindrical surface segment that defines an axis, so that the microlens array on the front side of the substrate faces the axis. A pulsed laser beam is scanned from the axis circumferentially along the cylindrical surface segment, to pass through the microlens array on the front side of the substrate and into the layer on the back side of the substrate to create the apertures, while simultaneously translating the substrate and/or the scanned pulsed laser beam axially relative to one another. Related apparatus and microlens array products are also disclosed.
Inventors:
Gardner, Richard N
Wilson, John W
Cox, brian sea
Jernigan, Reese A
Reid, david ell
Wilson, John W
Cox, brian sea
Jernigan, Reese A
Reid, david ell
Application Number:
JP2009531413A
Publication Date:
February 25, 2010
Filing Date:
October 02, 2007
Export Citation:
Assignee:
Bright View Technologies, Inc.
International Classes:
B23K26/38; B23K26/00; B23K26/06; B23K26/08; B23K26/40; B23K26/42; G02B3/00; G02B26/12
Domestic Patent References:
| JP2005151988A | 2005-06-16 | |||
| JPS61245991A | 1986-11-01 | |||
| JPH02226112A | 1990-09-07 |
Foreign References:
| WO2004111706A2 | 2004-12-23 |
Attorney, Agent or Firm:
Shoichi Okuyama
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura
Naomi Yoshida
Ayako Nakamura
Fukagawa Eri
Satoshi Morimoto
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura
Naomi Yoshida
Ayako Nakamura
Fukagawa Eri
Satoshi Morimoto