Title:
無線周波数インピーダンス整合のための方法およびデバイス、および半導体処理装置
Document Type and Number:
Japanese Patent JP7000598
Kind Code:
B2
Abstract:
A method for radio frequency impedance matching includes performing frequency scanning matching using first n pulse phases of first m pulse periods as a frequency scanning stage, and from an (m+1)-th pulse period to an M-th pulse period, maintaining a frequency scanning parameter of a pulse phase corresponding to each frequency scanning stage of each pulse period. The radio frequency includes M pulse periods, each pulse period includes N pulse phases, M and N are integers greater than 1, m and n are integers greater than 0, m
Inventors:
Way, gun
Way, Jin
Yang, Jin
Way, Jin
Yang, Jin
Application Number:
JP2020560351A
Publication Date:
January 19, 2022
Filing Date:
April 23, 2019
Export Citation:
Assignee:
Beijing NAURA Microelectronics Equipment Co.,LTD
International Classes:
H05H1/46; H03H7/38
Domestic Patent References:
| JP2013054856A |
Foreign References:
| US20170054418 |
Attorney, Agent or Firm:
Mototsugu Morikawa