Title:
ダイヤモンド状カーボンを粒子にコーティングする方法と装置
Document Type and Number:
Japanese Patent JP4336040
Kind Code:
B2
Abstract:
A method for making particles coated with a diamond-like network, which can include additive components. The method comprises subjecting a multiplicity of particles to a carbon-based plasma in an evacuated radio frequency powered capacitively coupled reactor system in which ion sheaths are formed around the electrodes and wherein the particles are agitated in such a manner as to expose their surfaces to the reactive species in the plasma while keeping the particles substantially within an ion sheath.The advantages of the present invention include (i) the efficient deposition of DLN onto particles at high deposition rates, (ii) the deposition of densely-packed DLN coatings, (iii) the ability to perform in situ surface cleaning of particles by ion bombardment with oxygen- and argon-containing plasmas prior to deposition of DLN, and (iv) the ability to tailor the bulk and surface properties of the coatings by manipulating the composition of the coating and the intensity of ion bombardment during the coating process.
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Inventors:
Mojis M. David
Application Number:
JP2000522295A
Publication Date:
September 30, 2009
Filing Date:
October 07, 1998
Export Citation:
Assignee:
3M COMPANY
International Classes:
C23C16/30; B01J2/00; B22F1/16; C23C16/26; C23C16/27; C23C16/44; C23C16/442; C23C16/505; C23C16/509
Domestic Patent References:
| JP3040953A | ||||
| JP9087857A |
Attorney, Agent or Firm:
Takuji Yamada
Mitsuo Tanaka
Aoyama Aoi
Akira Ito
Mitsuo Tanaka
Aoyama Aoi
Akira Ito