Title:
強誘電材料のバルク導電率を増加するための方法及び装置
Document Type and Number:
Japanese Patent JP2007521508
Kind Code:
A
Abstract:
In one embodiment, a method of processing a ferroelectric material comprises enclosing the ferroelectric material and a metal source in a container, ramping up the temperature of the container, heating the container for a target amount of time at a temperature below a Curie temperature of the ferroelectric material, and then ramping down the temperature of the container. The target amount of time may be set to obtain a target conductivity. For example, the target amount of time may be about 25 hours or less.
Inventors:
Gallan boss, ludwig, el
McCree, Joseph, M
Miles, Ronald, Oh
McCree, Joseph, M
Miles, Ronald, Oh
Application Number:
JP2006517216A
Publication Date:
August 02, 2007
Filing Date:
June 10, 2004
Export Citation:
Assignee:
Silicon Light Machines Corporation
International Classes:
G02F1/355; B01J19/00; C01D15/00; C01G33/00; C01G35/00; H01L21/673; H01L
Attorney, Agent or Firm:
Satoshi Furuya
Takahiko Mizobe
Kiyoharu Nishiyama
Takahiko Mizobe
Kiyoharu Nishiyama