To eliminate the possibility of erroneous operation due to the leakage of remaining electric charge.

The micro actuator device has a plurality of micro actuators and a driving circuit which drives the micro actuators. For respective capacitors Cmn which are formed of a fixed electrode and a movable electrode of the movable part of respective actuators, the driving circuit has: a row-selection signal interlocked switches Mmnaa and Mmnab which turn on and turn off interlocked with row-selection signals and complementarily; and column-selection signal interlocked switches Mnba and Mnbb which turn on and turn off linked with column-selection signals and complementarily. Thus, the electrodes of the capacitor Cmn are always connected to either of electric voltage supply terminals Va and Vb.