To provide a micro capacitor capable of changing capacity by simple constitution, and securing and stabilizing the capacity.
The micro capacitor is provided with capacitors 11, 12 constituting a plurality of capacitors C, a dielectric film, a driving electrode 14, and a single power supply and constituted so that the lengths L1 of the displacing positions of respective electrode 11P in the capacity 11 is coincident with each other, and the lengths L2 of respective driving electrodes 14A in the driving electrode 14 are mutually different. When voltage to be applied from the single power supply to the driving electrode 14 is gradually changed in each of the driving electrodes 14A, the micro capacitor is successively switched based on differences of pull-In voltages among respective capacitors, thus changing the capacity.
ITO YASUYUKI
TANAKA NAOHIRO
MITARAI TAKASHI
Yasushi Santanzaki