微細凹部加工装置及び微細凹部加工方法

Title:

微細凹部加工装置及び微細凹部加工方法

Document Type and Number:

Japanese Patent JP4427750

Kind Code:

B2

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Inventors:

Yoshitaka Uehara
▲高▼嶋和彦
Minoru Ota

Application Number:

JP2005201231A

Publication Date:

March 10, 2010

Filing Date:

July 11, 2005

Export Citation:

Assignee:

Nissan Motor Co., Ltd

International Classes:

B24B19/02; B21H7/14; B24B33/02; F02F1/00

Domestic Patent References:

Attorney, Agent or Firm:

Janggi Motonori

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