To provide a micro electric machine system (MEMS) apparatus enhancing a capacitance ratio or insulation characteristics, and also enhancing an accuracy of an airtightness test, by reducing a parasitic capacitance of wiring.
The micro electric machine system apparatus comprises: a substrate on which a micro electric machine system is mounted; and a seal cap joined with the substrate to seal the micro electric machine system in an airtight manner. The cap has: a first recess 208 which is formed on the first main surface side opposing to the micro electric machine system (MEMS) 130 with a micro movable structure 113 being a main component, and stores the micro electric machine system 130; a plurality of built-in electrodes 207 connected to an electrode of the micro electric machine system, and extending in the direction substantially orthogonal to the first main surface; and a second recess 209 formed between the adjacent built-in electrodes 207 and communicated with the first recess 208, on the first main surface side.
NAGANO TOSHIHIKO
ITAYA KAZUHIKO
KAWAKUBO TAKASHI
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