Title:
MICRO ELECTRO-MECHANICAL HEATER
Document Type and Number:
Japanese Patent JP2016029662
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a micron scale heating stage enabling nano scale in-situ observation.SOLUTION: A MEMS heater 100 including a heating element and a sensing element is disposed on a test sample stage 52 to be apart from a base interface 53. Thus, a test sample on a sample mount 402 is heated from an adjacent location, and heat transfer between other portions of a test sample holder 55 and the test sample via the sample stage 52 is minimized, so that thermal expansion and temperature drift are improved.SELECTED DRAWING: Figure 6B
Inventors:
OH YUNJE
SYED AMANULLA SYED ASIF
EDWARD CYRANKOWSKI
ODEN L WARREN
SYED AMANULLA SYED ASIF
EDWARD CYRANKOWSKI
ODEN L WARREN
Application Number:
JP2015202642A
Publication Date:
March 03, 2016
Filing Date:
October 14, 2015
Export Citation:
Assignee:
HYSITRON INC
International Classes:
H01J37/20; G01N3/42
Domestic Patent References:
| JPS5588256A | 1980-07-03 | |||
| JPS6327731A | 1988-02-05 | |||
| JP2009193833A | 2009-08-27 | |||
| JPH0181553U | 1989-05-31 | |||
| JPS58173159U | 1983-11-19 | |||
| JPS4996867U | 1974-08-21 | |||
| JP2009526230A | 2009-07-16 |
Foreign References:
| US20080276727A1 | 2008-11-13 |
Attorney, Agent or Firm:
Yoshiyuki Osuga
Osugenai Foreign Patent Office Patent Business Corporation
Osugenai Foreign Patent Office Patent Business Corporation
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