MICRO ELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION

Japanese Patent JP2012212159

A

To provide a micro electromechanical device with an optical function separated from mechanical and electrical functions.

A micro electromechanical (MEMS) device (800) comprises: a substrate (20) having a top surface (88); a movable element (810) over the substrate (20); and a drive electrode (82). The movable element (810) comprises; a deformable layer (34); and a reflective element (814) mechanically coupled to the deformable layer (34). The reflective element (814) comprises a reflective surface (92). The drive electrode (82) is disposed in a lateral direction from the reflective surface (92). The movable element (810) responds to voltage difference applied between the drive electrode (82) and the movable element (810) by moving in a direction generally perpendicular to the top surface (88) of the substrate (20).

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DENIS ENDISCH
MIGNARD MARC

JP2012137593A

November 01, 2012

June 19, 2012

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QUALCOMM MEMS TECHNOLOGIES INC

G02B26/02; B81B3/00; B81C1/00; G09F9/37

JP2003177336A	2003-06-27
JP2008514985A	2008-05-08
JP2005309099A	2005-11-04
JPH11258558A	1999-09-24
JP2004012642A	2004-01-15
JP5065487B2	2012-10-31

Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro

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