Title:
MICRO ELECTROMECHANICAL SYSTEMS THERMAL SWITCH
Document Type and Number:
Japanese Patent JP2010192443
Kind Code:
A
Abstract:
To provide a micro Electro-mechanical systems (MEMS) thermal switch.
The switch includes a FET having a source and drain in a substrate and a beam isolated from the substrate. The beam is positioned over the source and the drain and spaced by a predefined gap. When the thermal set point is reached, the beam moves to electrically connect the source to the drain.
Inventors:
Kang, Joon-won
Application Number:
JP2010000030160
Publication Date:
September 02, 2010
Filing Date:
February 15, 2010
Export Citation:
Assignee:
HONEYWELL INTERNATL INC
International Classes:
H01H37/52; B81B3/00; B81C1/00; H01H1/00; H01H11/00; H01H59/00; H01H61/00
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