PURPOSE: To prevent separation of a wiring pattern beforehand by forming a wiring pattern part such as an extraction electrode of a micro-field emission cathode device by using silicide or inserting a silicon layer between the silicide and an insulating film.
CONSTITUTION: An electron beam is taken out by field emission from a sharply pointed emitter tip 2 formed on a board 1. A wiring pattern part such as a leader electrode 4 of such micro-field emission cathode device is formed by using molybdenum silicide, tantalum silicide, niobium silicide and so on. Or so-called polycide formed by inserting a silicon layer between this silicide and an insulating layer 3 is used. In this way, adhesion to the insulating layer can be improved, and separation of a wiring pattern can be prevented.
BETSUI KEIICHI
TOYODA OSAMU
