To provide a micro heater that has a micro bridge and functional thin film that have high quality and are manufactured with a high yield and can be developed to a multi-functional sensor.
A micro bridge 1 is provided with lamination structure consisting of a thermal oxidation SiO2 film 11, metal wiring 15 for heating that is formed to form a heating part 3 on it, a middle-layer SiO2 film 12 that is formed on the metal wiring 15 for heating and the thermal oxidation SiO2 film 11 by the sputtering method, metal wiring 16 and 17 for electrode being formed on the SiN film 13, an upper-layer SiO2 film 14 that is formed on the metal wiring 16 and 17 for electrode and the SiN film 13 by the sputtering method, and an opening 18 that is formed by eliminating one portion of the upper-layer SiO film 14 to expose one portion of the metal wiring 16 and 17 for electrode. Also, a functional thin film 4 where electrical characteristics change in response to a specific target to be measured is formed partially at the opening 18.
NAKAI TAKETO
YOSHIIKE NOBUYUKI
SAKURAI YOSHIAKI
HOCHIKI CO
MATSUSHITA ELECTRIC IND CO LTD
OSAKA PREFECTURE