Title:
MICRO ION PUMP OF THIN FILM EDGE FIELD EMITTER BASE
Document Type and Number:
Japanese Patent JP2015165497
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an ion pump of micro size, in which power and life are improved.SOLUTION: In a micro ion pump 10 having a plurality of thin film edge field emitters 100-1, -5, a first gate electrode 115, a second gate electrode 110, and a high voltage positive electrode 150, the plurality of thin film edge field emitters 100 located on the first X-Z plane have a plurality of end faces 101-1, -5 having a high aspect ratio of at least one Y-Z plane, respectively, the first gate electrode 115 exists on a second X-Z plane offset from the first X-Z plane, the second exists on the third X-Z plane offset from the first X-Z plane, the high voltage positive electrode 150 exists on the fourth X-Z plane offset from the first X-Z plane, and the second gate electrode 110 exists between the high voltage positive electrode 150 and the plurality of thin film edge field emitters 100-1, -5.
Inventors:
STEVEN TIN
Application Number:
JP2015032923A
Publication Date:
September 17, 2015
Filing Date:
February 23, 2015
Export Citation:
Assignee:
HONEYWELL INT INC
International Classes:
H01J41/18; B81B1/00; F04B37/04
Attorney, Agent or Firm:
Shinjiro Ono
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto
Naoki Kazuma
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto
Naoki Kazuma