To suppress deformation due to thermal expansion in a micro machine with a diaphragm structure, beam structure, or bridge structure.

Expansion suppressing members 15 made of a substance of a smaller coefficient of thermal expansion than that of a supporting body 14 are symmetrically arranged in a micro machine with a base 12, action body 13, and the supporting body 14 to support the action body 13 at the base 12. As a bending stress due to differences in lengths of expansion is symmetrically canceled out in this constitution, it is possible to make a strong expansion suppressing force work only in the direction of thermal expansion of the supporting body 14. Therefore, it is possible to effectively suppress deformations of the micro machine due to thermal expansion.