Title:
MICRO-MACHINE SENSOR AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3447625
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a micro-machine sensor which can be manufactured easily and on which a semiconductor circuit can be mounted easily, and a method by which the sensor can be manufactured without deteriorating the product quality of the sensor.
SOLUTION: A micro-machine sensor is provided with en electronic circuit integrated on a chip and has a hollow chamber 12, a film 13, a counter electrode 14, and openings 7 for ventilation. The hollow chamber 12 is communicated with the circumference through the openings 7. The openings 7 are oriented to the upper surface side of a wafer and the counter electrode 14 constitutes part of a flat layer 5 formed over the whole surface of the chip. A semiconductor electronic circuit 11 is mounted on the flat layer 5 by the widely known semiconductor technology.
Inventors:
Robert Aigner
Thomas baver
Hans-Jeruktimer
Thomas baver
Hans-Jeruktimer
Application Number:
JP22774699A
Publication Date:
September 16, 2003
Filing Date:
August 11, 1999
Export Citation:
Assignee:
Siemens Aktiengesellschaft
International Classes:
B81B3/00; B06B1/06; B81C1/00; G01L9/00; G01L9/12; H01L41/09; H04R19/00; (IPC1-7): G01L9/12; B81B3/00; B81C1/00; H01L41/09
Domestic Patent References:
| JP4143628A | ||||
| JP60138434A | ||||
| JP799326A | ||||
| JP8181332A |
Other References:
【文献】国際公開98/023934(WO,A1)
Attorney, Agent or Firm:
Toshio Yano (3 outside)