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Title:
MICRO MACHINE SWITCH AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JP2000188049
Kind Code:
A
Abstract:

To provide an inexpensive micro switch of high performance which can be produced in high volume.

A micro machine switch comprises: a support member 7 which is disposed in the proximity of a gap on a signal line on a substrate 1 and has a predetermined height with respect to the surface of the substrate 1; a flexible beam member (a cantilever arm 8) which projects from the support member 7 substantially horizontally with respect to the surface of the substrate 1 and is disposed at a part thereof opposite to the gap; a contact electrode 5 disposed in at least a position opposite to the gap on a side of the substrate 1 in the beam member; and a lower electrode 4 disposed opposite to a part of the beam member on the substrate 1. The beam member functions as an upper electrode 9 since it has conductivity from a portion in connection with the support member 7 to a position opposite to the lower electrode 4. Furthermore, the beam member has substantially symmetric thermal expansion coefficients along a thickness direction perpendicular to the surface of the substrate 1 in at least a region from the portion in connection with the support member 7 to the proximity of the position opposite to the lower electrode 4.


Inventors:
SUZUKI KENICHIRO
ARA YOICHI
CHIN SHOKO
Application Number:
JP36567798A
Publication Date:
July 04, 2000
Filing Date:
December 22, 1998
Export Citation:
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Assignee:
NEC CORP
International Classes:
H01H11/00; B62D57/00; B81B3/00; B81B7/04; B81C1/00; H01H1/02; H01H1/26; H01H59/00; H01H1/20; (IPC1-7): H01H59/00; B62D57/00; H01H1/02; H01H1/26; H01H11/00; H01H13/00; H01H13/14
Attorney, Agent or Firm:
Masaki Yamakawa