To provide an inexpensive micro switch of high performance which can be produced in high volume.
A micro machine switch comprises: a support member 7 which is disposed in the proximity of a gap on a signal line on a substrate 1 and has a predetermined height with respect to the surface of the substrate 1; a flexible beam member (a cantilever arm 8) which projects from the support member 7 substantially horizontally with respect to the surface of the substrate 1 and is disposed at a part thereof opposite to the gap; a contact electrode 5 disposed in at least a position opposite to the gap on a side of the substrate 1 in the beam member; and a lower electrode 4 disposed opposite to a part of the beam member on the substrate 1. The beam member functions as an upper electrode 9 since it has conductivity from a portion in connection with the support member 7 to a position opposite to the lower electrode 4. Furthermore, the beam member has substantially symmetric thermal expansion coefficients along a thickness direction perpendicular to the surface of the substrate 1 in at least a region from the portion in connection with the support member 7 to the proximity of the position opposite to the lower electrode 4.
ARA YOICHI
CHIN SHOKO