Title:
MICRO MECHANICAL COMPONENT
Document Type and Number:
Japanese Patent JP2002022763
Kind Code:
A
Abstract:
To effectively prevent the sticky action of a flexible spring device on an adjacent part in overloaded acceleration by improving a micro mechanical component.
This micro mechanical component, particularly an acceleration sensor, is provided with a seismic mass body 10 spring-supported onto a base 1 through a flexible spring device 40 and deflectable at least in one direction P by acceleration. The deflection of the seismic mass body 10 can be limited by first stopper devices 200, 200', and the flexible spring device 40 is mounted to the side of the seismic mass body 10. In this case, second stopper devices 300, 400, 450, 600 are further provided for limiting the distortion of the flexible spring device 40.
Inventors:
KIPP ANDREAS
PINTER STEFAN DR
FISCHER FRANK
PINTER STEFAN DR
FISCHER FRANK
Application Number:
JP2001145351A
Publication Date:
January 23, 2002
Filing Date:
May 15, 2001
Export Citation:
Assignee:
BOSCH GMBH ROBERT
International Classes:
B81B3/00; G01P15/125; (IPC1-7): G01P15/125; B81B3/00
Attorney, Agent or Firm:
Toshio Yano (4 outside)