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Title:
MICRO MECHANICAL DEVICE, MICRO SWITCH, VARIABLE CAPACITY CAPACITOR, HIGH FREQUENCY CIRCUIT AND OPTICAL SWITCH
Document Type and Number:
Japanese Patent JP2006346830
Kind Code:
A
Abstract:

To provide a micro mechanical device, a micro switch, a variable capacity capacitor, a high frequency circuit and an optical switch capable of restraining malfunction.

This micro mechanical device comprises a first piezoelectric driving actuator 10A having a piezoelectric film 21, lower part electrodes 22A, 23A and upper part electrodes 22B, 23B to sandwiching the piezoelectric film 21 and a supporting film 25 to support the piezoelectric film 21 and extending to a first working part from a first fixed part 12 fixed on a substrate 11, and a second piezoelectric driving actuator 10B provided on the first working part of the first piezoelectric driving actuator 10A and extending to a second working part with a connecting part with the first piezoelectric driving actuator 10A as a fixed part. The second piezoelectric driving actuator 10B is formed shorter than the first piezoelectric driving actuator 10A.


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Inventors:
KAWAKUBO TAKASHI
NAGANO TOSHIHIKO
ABE KAZUHIDE
NISHIGAKI MICHIHIKO
Application Number:
JP2005178367A
Publication Date:
December 28, 2006
Filing Date:
June 17, 2005
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
B81B3/00; H01G5/00; H01G5/18; H01H57/00; H02N2/00
Domestic Patent References:
JPH04129043A1992-04-30
JPH0225081A1990-01-26
JPH06230295A1994-08-19
JPS6244711A1987-02-26
JP2005092987A2005-04-07
JP2004221285A2004-08-05
JP2005094585A2005-04-07
JP2004516783A2004-06-03
JPS5933123U1984-03-01
JPS63260085A1988-10-27
JPH0238759U1990-03-15
JPH02108355U1990-08-29
JPH02244778A1990-09-28
JP2003211395A2003-07-29
JP2003281988A2003-10-03
Foreign References:
WO2003062899A12003-07-31
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu



 
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