Title:
マイクロメカニカルデバイス
Document Type and Number:
Japanese Patent JP4037394
Kind Code:
B2
Abstract:
A piezoelectric actuator includes a first beam including a first bottom electrode, a first piezoelectric film on the first bottom electrode, and a first top electrode on the first piezoelectric film, a fixed end assigned at an end of the first beam and fixed on a substrate, a connecting end assigned at another end of the first beam and suspended over a free space; and a second beam including a second piezoelectric film connected to the first piezoelectric film at the connecting end, a second bottom electrode under the second piezoelectric film, and a second top electrode on the second piezoelectric film, a working end assigned at an end of the second beam opposite to another end to which the connecting end is assigned and suspended over the free space; wherein a distance between centers of the fixed end and the working end is shorter than a distance from the working end to the connecting end.
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Inventors:
Takashi Kawakubo
Toshihiko Nagano
Kazuhide Abe
Toruhiko Nishigaki
Toshihiko Nagano
Kazuhide Abe
Toruhiko Nishigaki
Application Number:
JP2004269911A
Publication Date:
January 23, 2008
Filing Date:
September 16, 2004
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H02N2/00; B81B3/00; H01G5/18; H01H57/00; H01L41/08; H01L41/09; H01L41/18; H01L41/22
Domestic Patent References:
| JP2003181800A | ||||
| JP2004215039A | ||||
| JP200479991A | ||||
| JP2129514A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu