Title:
マイクロ可動素子製造方法
Document Type and Number:
Japanese Patent JP5470767
Kind Code:
B2
Abstract:
A method for manufacturing a micro movable element includes: forming a movable section, a frame, and a connecting section connecting the movable section with the frame on a substrate; bonding a film to a surface of the substrate in forming the movable section, the frame, and the connecting section; and patterning the film to form a support structure being bridged between the movable section and the frame.
Inventors:
High Horse Satoru
Osamu Tsuboi
Yoshihiro Mizuno
Hiromitsu Soneda
Okuda Hisao
Go Matsumoto
Ippei Sawaki
Osamu Tsuboi
Yoshihiro Mizuno
Hiromitsu Soneda
Okuda Hisao
Go Matsumoto
Ippei Sawaki
Application Number:
JP2008193189A
Publication Date:
April 16, 2014
Filing Date:
July 28, 2008
Export Citation:
Assignee:
富士通株式会社
International Classes:
B81C1/00; B81B3/00; G01C19/56; G01C19/5712; G01P15/125; H01H49/00; H01H59/00; H01L29/84
Domestic Patent References:
| JP2000246700A | ||||
| JP2008080430A | ||||
| JP2001264650A |
Attorney, Agent or Firm:
Shuhei Katayama