To accurately measure a pressure value in a vacuum environment without disturbing the environment.
A micro pressure sensor is composed of a heat conduction type pressure sensor part 2 arranged on a necessary position in a vacuum device and a control part 3 arranged on an outer wall of the vacuum device. The pressure sensor part 2 includes: a polymeric film support having a cavity part formed by a bottom and a cylindrical or square frame; a polymeric film 21 stuck to the upper surface of the frame of the polymeric film support by adhesive; one pressure sensor 22 arranged on a center part of the polymeric film 21; and one or more temperature sensors 23 arranged on the periphery of the pressure sensor 22. The pressure sensor 22 and the temperature sensors 23 are connected to a control part 3 respectively through electrodes. The control part 3 applies heating power to the pressure sensor 22 to control heating to a fixed temperature, the temperature sensors 23 measure the peripheral temperatures of the pressure sensor 22 by resistance changes, and a pressure value corresponding to the heating power in the vacuum device is corrected by the resistance changes to measure an accurate pressure value in the vacuum device.
TAJIRI SHUICHI
AOZONO TAKASHI
OGAWA SOICHI
MIMA KOJI
OKAMOTO AKIO
OGAWA SOICHI
MIMA KOJI
TECH RES INST OF OSAKA PREFECTURE
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