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Patent Searching and Data


Title:
MICRO PRSSURE FLUCTUATION DETECTION UNIT AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH08247875
Kind Code:
A
Abstract:

PURPOSE: To provide the micro pressure fluctuation detection unit which is high in pressure detection sensitivity, excellent in corrosion resistance, less degraded in characteristics, and easy to manufacture.

CONSTITUTION: A flexible insulating thin film 2 is stretched over the upper surface of a substrate stationary ring 1, and a lower electrode 3 and a piezo electric element 4 are provided over the film. A first stationary ring 5 having a first cut-out section at its section corresponding to the electrode outlet section 3a of the lower electrode 3 is provided so that the lower electrode 3 and the piezo electric element 4 are thereby enclosed. An upper electrode 7 is set up over the piezo electric element 4, and a passivation film 8 is provided over the upper electrode for its protection. A second stationary ring 9 is provided to enclose the circumference of the first stationary ring 5. The insulating thin film 2, the passivation film and the stationary rings 1, 5 and 7 are made out of a fluorine resin system high polymer compound excellent in corrosion resistance against city gas. The fluorine resin system high polymer compound is treated by high voltage corona discharge in such a way that its surface is activated so as to be capable of being bonded with adhesives.


Inventors:
ISHII MAKOTO
Application Number:
JP5077295A
Publication Date:
September 27, 1996
Filing Date:
March 10, 1995
Export Citation:
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Assignee:
YAZAKI CORP
International Classes:
G01F1/20; G01L7/00; G01L9/08; (IPC1-7): G01L9/08; G01F1/20; G01L7/00
Attorney, Agent or Firm:
Hideo Takino (1 outside)