To provide a micro-pump device for stably transferring a fluid at a very low flow-rate, continuously and quantitatively without causing pulsation.
The micro-pump device 1 includes a plurality of elastic tubes 10 in which fluid is circulated, a projection 26 for forming a plurality of airtight spaces in the inside of the elastic tubes 10 by pressing the elastic tubes 10, a direct-drive motor 16 for transferring the fluid by moving the projection 26 relative to the elastic tubes 10, a flow-rate sensor 36 for detecting a flow-rate of the fluid on the discharge side, a pressure sensor 38 for detecting pressure of the fluid on the discharge side, and a controller 44 for regulating the movement rate of the projection 26 by the direct drive motor 16 on the basis of output signals of the flow-rate sensor 36 and the pressure sensor 38.
COPYRIGHT: (C)2008,JPO&INPIT
HIRATA KAZUYA
HIYAMA HIROKUNI
ICHIKI KATSUNORI
NOMI MOTOHIKO
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori
Tetsuya Hirosawa
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