To provide a high-output micro pump.
A micro pump 1 comprises a first base material 10, a second base material 20, and a gas generating material 30. The first base material 10 is provided with a first microchannel 11. The first microchannel 11 has a first opening part 11a with an opening in a principal plane 10a of the first base material 10. The second base material 20 is provided with a second microchannel 21. The second microchannel 21 has a second opening part 21a having an opening in a principal plane 20a of the second base material 20. The gas generating material 30 is bonded to the principal plane 10a of the first base material 10 and the principal plane 20a of the second base material 20. The first and the second opening parts 11a and 21a are plugged with the gas generating material 30. The first opening part 11a and the second opening part 21a are opposed to each other through the gas generating material 30.
FUKUOKA MASATERU
YAMAMOTO KAZUYOSHI
| JP2004347371A | 2004-12-09 | |||
| JP2010107515A | 2010-05-13 | |||
| JP2005297155A | 2005-10-27 | |||
| JP2001322099A | 2001-11-20 |
| WO2006123578A1 | 2006-11-23 | |||
| WO2009123009A1 | 2009-10-08 |
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