PURPOSE: To provide a micro-relay with which a large contact load can be obtained, and which has high electric reliability.
CONSTITUTION: A micro-relay 100 has a movable part base body 20 and a fixed part base body 30. The fixed part base body 30 has a base plate 21, and a fixed contact layer 23 formed on its surface. The movable part base body 20 has a base plate 15, a movable member 20a supported on a surface of the base plate 15 to be movable at both end parts, and a movable contact layer 31 formed almost at a middle position of the movable member. The movable member 20a includes a first and a second metal films 1a, 1b. The second metal film 1b comprises material having a higher thermal expansion coefficient than the first metal film 1a. This movable part 20a is capable of deformation in a specified space between the base plate 15 and the base plate 21, and the movable contact layer 3a gets in contact with the fixed contact layer 23 to press it by its deformation.
HIRATA SUSUMU
MATOBA KOJI
YAMASHITA ZENJIRO
INUI TETSUYA
OTA KENJI
