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Title:
MICRO-SPECTRAL ANALYZER
Document Type and Number:
Japanese Patent JPH10122961
Kind Code:
A
Abstract:

To dispense with a high manufacturing precision or assembling precision and eliminate a movable part by integrating and microminiaturize a spectral filter, a microlens and a photo detector.

Spectral filters 9-12, microlenses 13a-13d and photo detectors 14a-14d are integrated and microminiaturized, or arrayed. Since an incident light 100 is transmitted by the spectral filters 9-12 having different wavelength selective characteristics, the lights transmitted by the spectral filters 9-12 form selected wavelength components. The transmitted lights are converged by the microlenses 13a-13d, and incident on the photo detectors 14a-14d. The output signals 101a-101d detected and outputted by the photo detectors 14a-14d form light intensity signals corresponding to the wavelengths selected by the spectral filters 9-12, respectively. Thus, the light intensity signals corresponding to the respective selected wavelengths are collectively processed, whereby a spectral pattern can be provided.


Inventors:
HARA HITOSHI
YAMAGISHI HIDEAKI
Application Number:
JP27332796A
Publication Date:
May 15, 1998
Filing Date:
October 16, 1996
Export Citation:
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Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
G01J3/28; B81B1/00; G01N21/25; (IPC1-7): G01J3/28; G01N21/25
Attorney, Agent or Firm:
Masayasu Watanabe