To provide a micro thermal expansion temperature sensor using a thermal expansion material as a material for constituting a sensitive thermal expansion temperature sensor and having a large temperature coefficient of resistance.

The micro thermal expansion temperature sensor is provided with a thermal expansion temperature sensor layer disposed on a tip of a support base and comprising a material having a large thermal expansion coefficient, and measures a temperature of a minute region. In the micro thermal expansion temperature sensor, a thermal conduction control layer is provided between the support base and the thermal expansion temperature sensor layer, and the thermal expansion material covered with a high thermal conduction insulation layer on a sample contact side of the thermal expansion temperature sensor layer, is used.