Title:
MICRO VACUUM PUMP AND DEVICE FOR MOUNTING MICRO VACUUM PUMP
Document Type and Number:
Japanese Patent JP3024602
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To assure quality as a vacuum pump by enhancing exhausting capability to rare gas as well as active gas and provide a getter effect well reproducible and stable over a long period of time.
SOLUTION: This vacuum pump is equipped with a first conductive substrate 2 having a multiplicity of micro projection parts 5, and a second conductive substrate 4 which is disposed at a fixed space from the first conductive substrate 2 and to which a potential lower than that the micro projection parts 5 have is applied. Gate electrodes 3 confronting the second conductive substrate 4 are disposed on the first conductive substrate 2 via insulation layers 6, and the gate electrodes 3 are positioned near the micro protection parts 5 and each comprise an electrode to which a potential lower than that the micro projection parts 5 have is applied.
Inventors:
Fuminori Ito
Application Number:
JP21207697A
Publication Date:
March 21, 2000
Filing Date:
August 06, 1997
Export Citation:
Assignee:
NEC
International Classes:
H01J29/94; H01J29/04; H01J31/12; H01J41/06; H01J41/12; (IPC1-7): H01J41/12; H01J29/94; H01J31/12
Domestic Patent References:
| JP7245071A | ||||
| JP8167394A | ||||
| JP9245724A |
Attorney, Agent or Firm:
Kihei Watanabe