Title:
【発明の名称】マイクロ弁
Document Type and Number:
Japanese Patent JP3285863
Kind Code:
B2
Abstract:
PCT No. PCT/DE93/00493 Sec. 371 Date Dec. 16, 1994 Sec. 102(e) Date Dec. 16, 1994 PCT Filed Jun. 8, 1993 PCT Pub. No. WO94/00696 PCT Pub. Date Jan. 6, 1994The microvalve according to the invention is composed in a layered manner of at least one bottom part (11), one middle part (12) and one top part (13). The sealing ring (31) (closure member), the valve plate (29) (pressure-compensating surface) and the membrane (26) are integrated in the middle part (12), this integral component being manufactured by a plastic moulding process. The actuation of the valve takes place using an electrical operating apparatus, for example by an electrostatic drive, an electromagnetic or a piezoelectric drive. In particular in the case of the electrostatic drive, two electrodes (17, 22) are applied in a layered manner to the middle part (12) or the bottom part (11). The bottom part, middle part and top part are joined together and connected, for example bonded or welded, permanently to one another.
Inventors:
Mettner, Michael
Schulke, Armin
Dilling, Christian
Sitney, Thomas
Schulke, Armin
Dilling, Christian
Sitney, Thomas
Application Number:
JP50193394A
Publication Date:
May 27, 2002
Filing Date:
June 08, 1993
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
F16K31/02; F15C5/00; F16K31/06; F16K99/00; (IPC1-7): F16K31/02; F16K31/06
Domestic Patent References:
| JP4841197B1 |
Other References:
【文献】国際特許出願公開90/15933(WO,A1)
【文献】国際特許出願公開91/2169(WO,A1)
【文献】仏国特許出願公開1395241(FR,A1)
【文献】米国特許5065978(US,A)
【文献】西独国特許出願公開2039133(DE,A1)
【文献】国際特許出願公開91/2169(WO,A1)
【文献】仏国特許出願公開1395241(FR,A1)
【文献】米国特許5065978(US,A)
【文献】西独国特許出願公開2039133(DE,A1)
Attorney, Agent or Firm:
Toshio Yano (3 outside)