Title:
MICRO WIRE AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2006167857
Kind Code:
A
Abstract:
To provide a micro wire having a diameter smaller than 1 nm.
The micro wire is composed by connecting a plurality of first clusters made of a first element or by connecting a plurality of second clusters made of a second element and the first clusters made of the first element.
Inventors:
EGUCHI HARUKI
FUCHIGAMI KENJI
YANO TOSHIKAZU
TSUBURAYA KAZUO
FUCHIGAMI KENJI
YANO TOSHIKAZU
TSUBURAYA KAZUO
Application Number:
JP2004363476A
Publication Date:
June 29, 2006
Filing Date:
December 15, 2004
Export Citation:
Assignee:
ISHIKAWAJIMA HARIMA HEAVY IND
TSUBURAYA KAZUO
TSUBURAYA KAZUO
International Classes:
B82B1/00; B82B3/00; H01L21/3205; H01L29/06
Domestic Patent References:
| JP2002029728A | 2002-01-29 | |||
| JP2002029728A | 2002-01-29 |
Other References:
JPN6010021562, Ａｂｈｉｓｈｅｋ Ｋｕｍａｒ Ｓｉｎｇｈ ｅｔ ａｌ, "Ｃｌｕｓｔｅｒ Ａｓｓｅｍｂｌｅｄ Ｍｅｔａｌ Ｅｎｃａｐｓｕｌａｔｅｄ Ｔｈｉｎ Ｎａｎｏｔｕｂｅｓ ｏｆ Ｓｉｌｉｃｏｎ", Ｎａｎｏ Ｌｅｔｔｅｒｓ, 20021018, ２（１１）, ｐ．１２４３−１２４８, Ａｍｅｒｉｃａｎ Ｃｈｅｍｉｃａｌ Ｓｏｃｉｅｔｙ
JPN6010021563, Ｊａｅｉｌ Ｂａｉ ｅｔ ａｌ, "Ｍｅｔａｌｌｉｃ ｓｉｎｇｌｅ−ｗａｌｌｅｄ ｓｉｌｉｃｏｎ ｎａｎｏｔｕｂｅｓ", ＰＮＡＳ, 20040302, １０１（９）, ２６６４−２６６８, Ｔｈｅ Ｎａｔｉｏｎａｌ Ａｃａｄｅｍｙ ｏｆ Ｓｃｉｅｎｃｅｓ
JPN6010021564, Ｄ．Ｄ．Ｄ．Ｍａ ｅｔ ａｌ, "Ｓｍａｌｌ−Ｄｉａｍｅｔｅｒ Ｓｉｌｉｃｏｎ Ｎａｎｏｗｉｒｅ Ｓｕｒｆａｃｅｓ", Ｓｃｉｅｎｃｅ, 20030321, ２９９（５６１４）, ｐ．１８７４−１８７７
JPN6010040738, 谷垣勝己他, "シリコン同位体で色分けされたナノクラスタによる新ナノデバイスの創製の可能性−超伝導から量子コンピュー", ＳＰｒｉｎｇ−８ Ｉｎｆｏｒｍａｔｉｏｎ, 200401, Ｖｏｌ．９，Ｎｏ．１, ｐ．３６−４１
JPN6010021563, Ｊａｅｉｌ Ｂａｉ ｅｔ ａｌ, "Ｍｅｔａｌｌｉｃ ｓｉｎｇｌｅ−ｗａｌｌｅｄ ｓｉｌｉｃｏｎ ｎａｎｏｔｕｂｅｓ", ＰＮＡＳ, 20040302, １０１（９）, ２６６４−２６６８, Ｔｈｅ Ｎａｔｉｏｎａｌ Ａｃａｄｅｍｙ ｏｆ Ｓｃｉｅｎｃｅｓ
JPN6010021564, Ｄ．Ｄ．Ｄ．Ｍａ ｅｔ ａｌ, "Ｓｍａｌｌ−Ｄｉａｍｅｔｅｒ Ｓｉｌｉｃｏｎ Ｎａｎｏｗｉｒｅ Ｓｕｒｆａｃｅｓ", Ｓｃｉｅｎｃｅ, 20030321, ２９９（５６１４）, ｐ．１８７４−１８７７
JPN6010040738, 谷垣勝己他, "シリコン同位体で色分けされたナノクラスタによる新ナノデバイスの創製の可能性−超伝導から量子コンピュー", ＳＰｒｉｎｇ−８ Ｉｎｆｏｒｍａｔｉｏｎ, 200401, Ｖｏｌ．９，Ｎｏ．１, ｐ．３６−４１
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Takashi Watanabe
Previous Patent: CUTTING TOOL AND MANUFACTURING METHOD FOR IT
Next Patent: POLISHING DEVICE, GRINDING WHEEL FOR USE IN IT, AND ROTOR SUPPORT DEVICE
Next Patent: POLISHING DEVICE, GRINDING WHEEL FOR USE IN IT, AND ROTOR SUPPORT DEVICE