Title:
マイクロアクチュエータ装置及び光スイッチシステム
Document Type and Number:
Japanese Patent JP4042551
Kind Code:
B2
Abstract:
A microactuator array includes a plurality of first terminals equal in number to a first number, a plurality of second terminals equal in number to a second number, and a plurality of microactuators equal in number to the product of the first number and the second number. Each microactuator comprises a fixed electrode and a movable electrode which is movable with respect to the fixed electrode by electrostatic force. Each first terminal is electrically connected to fixed electrodes of microactuators equal in number to the second number. Each second terminal is electrically connected to movable electrodes of microactuators equal in number to the first number. The first terminals are not connected to any of the second terminals.
Inventors:
Keiichi Akakawa
Application Number:
JP2002349313A
Publication Date:
February 06, 2008
Filing Date:
December 02, 2002
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B26/08; B81B3/00; B81B7/02; B81B7/04; G02B6/35; H02N1/00; G02B6/12
Domestic Patent References:
| JP2000028933A | ||||
| JP2000098269A | ||||
| JP2002062493A | ||||
| JP2002524271A |
Attorney, Agent or Firm:
Shinomiya Dori