Title:
マイクロアクチュエータ装置
Document Type and Number:
Japanese Patent JP4880167
Kind Code:
B2
Abstract:
The invention relates to a micro reactor arrangement, particularly for a micro relay. It comprises a substrate (1) with two thermomechanical micro actuators (3, 4). In response to thermal stimulation, the first micro actuator (3) performs a movement in parallel with the substrate surface (2), while the second micro actuator moves in a direction orthogonal on the substrate surface (2). Both thermomechanical micro actuators are so disposed relative to each other that the first micro actuator (3), in the extended state, reaches under the second micro actuator (4). With these provisions, the first micro actuator (3) can be maintained in this position without supply of power when the second micro actuator (4) is de-energized. With the present micro actuator arrangement, one can achieve the advantages of a high activation force and long positioning travels of thermomechanical micro actuators for micro relays, without the necessity to supply energy for maintaining the individual switching states.
Inventors:
Kwenzel Hans Joachim
Wagner, Bernd
Wagner, Bernd
Application Number:
JP2001571436A
Publication Date:
February 22, 2012
Filing Date:
March 16, 2001
Export Citation:
Assignee:
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E. V.
International Classes:
B81B3/00; H01H37/48; H01H61/02; H01H1/00
Domestic Patent References:
| JP2001264651A | ||||
| JP11284362A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura