Title:
MICROACTUATOR AND MICRORELAY USING SAME
Document Type and Number:
Japanese Patent JPH06251673
Kind Code:
A
Abstract:
PURPOSE: To provide a microactuator which does not need assembling process and is possible to make a device compact and have multipoles.
CONSTITUTION: A microactuator is provided with a plurality of fins 120 which have mutually parallel one side face and the other side face. A supporting body 100 to support one end of the fins 120 and arrange the plurality of the fins 120 in parallel on a horizontal plane is formed unitedly with the fins 120. A metal body 130 is installed in one side face of at least one fin. At least one fin 120 is made to move horizontally by heating the metal body 130 by Joule's heat.
Inventors:
HIRATA SUSUMU
ISHII YORISHIGE
INUI TETSUYA
OTA KENJI
YAMASHITA ZENJIRO
ISHII YORISHIGE
INUI TETSUYA
OTA KENJI
YAMASHITA ZENJIRO
Application Number:
JP3676793A
Publication Date:
September 09, 1994
Filing Date:
February 25, 1993
Export Citation:
Assignee:
SHARP KK
International Classes:
H01H37/52; H01H61/01; (IPC1-7): H01H37/52; H01H61/01
Attorney, Agent or Firm:
Fukami Hisaro