Title:
MICROACTUATOR AND MICRORELAY
Document Type and Number:
Japanese Patent JPH06283083
Kind Code:
A
Abstract:
PURPOSE: To provide a microactuator and a microrelay having a wide range of service temperature.
CONSTITUTION: A metallic film 130 with a large linear expansion coefficient and a metallic film 120 with a small linear expansion coefficient are stacked on top of each other. Regarding the bimetal 110 so constructed, a temperature correction metallic film 140 with a large linear expansion coefficient is stacked at the side of the metallic film 120 with a small linear expansion coefficient via a material film 150 of low thermal conductivity.
Inventors:
HIRATA SUSUMU
ISHII YORISHIGE
INUI TETSUYA
YAMASHITA ZENJIRO
OTA KENJI
ISHII YORISHIGE
INUI TETSUYA
YAMASHITA ZENJIRO
OTA KENJI
Application Number:
JP7196493A
Publication Date:
October 07, 1994
Filing Date:
March 30, 1993
Export Citation:
Assignee:
SHARP KK
International Classes:
H01H37/52; B81B3/00; H01H61/02; H01H1/00; (IPC1-7): H01H37/52
Attorney, Agent or Firm:
Fukami Hisaro
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