Title:
微小組み立てされた粒子フィルタ
Document Type and Number:
Japanese Patent JP3741440
Kind Code:
B2
Abstract:
A thin film filter fabricated using surface micromachining. The width of the filter pores is determined by the thickness of a sacrificial thin-film layer. This dimension can be precisely controlled, and may be as small as about 50 angstroms. The pore length may also be determined by the thickness of thin film layers and can therefore be smaller than the limit of resolution obtainable with photolithography. The filters are suitable for use at high temperatures and with many harsh solvents.
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Inventors:
Keller Christopher Gee.
Ferrari Moro
Ferrari Moro
Application Number:
JP52356295A
Publication Date:
February 01, 2006
Filing Date:
March 07, 1995
Export Citation:
Assignee:
The Regents of The University of California
International Classes:
B01D69/12; B01D39/16; B01D39/20; B01D67/00; B01D69/02; B01D71/02; B01D71/70; B81B1/00; C23C16/01; G03F7/00
Domestic Patent References:
| JP61111103A |
Attorney, Agent or Firm:
Minoru Nakamura
Fumiaki Otsuka
Shishido Kaichi
Hideto Takeuchi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Atsushi Hakoda
Fumiaki Otsuka
Shishido Kaichi
Hideto Takeuchi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Atsushi Hakoda