To provide a microchannel array having excellent measurement accuracy, capable of suppressing adhesion of bubbles onto a through hole.
This microchannel array includes the following formed on the front face side of a substrate 10: a first hollow 13 having a body part 131 having an inflow port 11 formed on one end and branched parts 132 formed by being branched plurally from the body part 131 toward the other end; a second hollow 14 having a body part 141 having an outflow port 12 formed on the other end and branched parts 142 formed by being branched plurally from the body part 141 toward one end, wherein the branched parts 142 are arranged alternately with the branched parts 132 of the first hollow; a wall part 15 for dividing the branched parts 132 of the first hollow from the branched parts 142 of the second hollow; and fine grooves 16 formed on the wall part 15, for communicating the branched parts 132 of the first hollow with the branched parts 142 of the second hollow. The aperture diameter of the inflow port 11 penetrating the substrate 10 is increased continuously at least from a prescribed depth up to the front face of the substrate 10.
TAMURA HIDETAKA
KITANI TAKENORI
TSURUTA HITOSHI
FUKUDA MOTOHIRO
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