Title:
MICROELECTRIC MECHANICAL SWITCH (MEMS) AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP3808052
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a structure and a manufacturing method of a microelectric mechanical switch (MEMS) device provided with a self-alignment spacer or a bump.
SOLUTION: The spacers arranged having the optimum size so as to make to the minimum a problem caused by stiction by functioning as restricting mechanism concerning the switch are designed. The spacers are manufactured by using the typically standard semi-conductor technology used for manufacturing a CMOS device. This method to manufacture these spacers does not need an additional deposition, excessive lithography process, and an additional etching.
Inventors:
Richard P. Volant
David Angel
Donald F. Canapelli
Joseph Tea Cosis
Kevin S. Petralka
Kenneth jay stain
William Sea Will
David Angel
Donald F. Canapelli
Joseph Tea Cosis
Kevin S. Petralka
Kenneth jay stain
William Sea Will
Application Number:
JP2003109122A
Publication Date:
August 09, 2006
Filing Date:
April 14, 2003
Export Citation:
Assignee:
INTERNATIONAL BUSINESS MASCHINES CORPORATION
International Classes:
B81B3/00; H01H59/00; B81C1/00; H01H49/00; (IPC1-7): H01H49/00; B81B3/00; B81C1/00; H01H59/00
Domestic Patent References:
| JP2000311573A | ||||
| JP2001067964A | ||||
| JP2000173375A | ||||
| JP8213803A |
Attorney, Agent or Firm:
Hiroshi Sakaguchi
Yoshihiro City
Takeshi Ueno
Yoshihiro City
Takeshi Ueno