Title:
MICROELECTRO-OPTOMECHANICAL DEVICE IMPLANTED WITH DOPANT AND METHOD OF MANUFACTURING FOR THE SAME
Document Type and Number:
Japanese Patent JP2002196267
Kind Code:
A
Abstract:
To provide a microelectro-optomechanical device implanted with a dopant and a method of manufacturing for the same.
The microelectro-optomechanical system(MEMS) optical device is provided. The microelectro-optomechanical system(MEMS) optical device has a substrate having an implanted light reflection optical layer and a mounting substrate which is movably mounted with the mirror. The dopant is included in the light reflection optical layer, by which the tensile stress of the device is increased and the curvature of the concave surface of the mirror structure is advantageously corrected toward the plane structure.
Inventors:
AKSYUK VLADIMIR A
JIN SUNGHO
KIM JUNGSANG
MAVOORI HAREESH
PARDO FLAVIO
RAMIREZ AINISSA
JIN SUNGHO
KIM JUNGSANG
MAVOORI HAREESH
PARDO FLAVIO
RAMIREZ AINISSA
Application Number:
JP2001312072A
Publication Date:
July 12, 2002
Filing Date:
October 10, 2001
Export Citation:
Assignee:
AGERE SYST GUARDIAN CORP
International Classes:
B81B3/00; G02B6/122; G02B6/26; G02B26/08; G02B6/12; (IPC1-7): G02B26/08; B81B3/00
Attorney, Agent or Firm:
Masao Okabe (10 outside)
Previous Patent: SIGNAL SWITCHING ELEMENT AND METHOD FOR OPERATION THE SAME
Next Patent: LASER MODULE FOR READING OPTICAL CODE
Next Patent: LASER MODULE FOR READING OPTICAL CODE