Title:
超格子を有する微小電気機械システム(MEMS)素子、及び関連方法
Document Type and Number:
Japanese Patent JP2008545542
Kind Code:
A
Inventors:
Blanchard, Richard A
Application Number:
JP2008513842A
Publication Date:
December 18, 2008
Filing Date:
May 31, 2006
Export Citation:
Assignee:
Mears Technologies, Inc.
International Classes:
B81B3/00; B81C1/00; B82B1/00; B82B3/00; H01H49/00; H01H57/00
Domestic Patent References:
| JP2003217421A | 2003-07-31 | |||
| JP2004535062A | 2004-11-18 |
Foreign References:
| US4590399A | 1986-05-20 |
Attorney, Agent or Firm:
Tadahiko Ito
Shinsuke Onuki
Tadashige Ito
Shinsuke Onuki
Tadashige Ito