Title:
微小電気機械システムおよび微小電気機械システム製造方法
Document Type and Number:
Japanese Patent JP4977850
Kind Code:
B2
Abstract:
A multi-layer device comprises a first layer with a micro-mechanical component formed thereon. There are also first and second sealing layers, with the first layer sandwiched between the first and second sealing layers and anodically bonded thereto to define a cavity therein as is provided within the cavity together with an electrode for reducing UV emission, the electrode formed on at least a part of a surface of the second sealing layer internal to the cavity and arranged to be in electrical contact, in use, with the first layer.
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Inventors:
Tronde West Guard
Application Number:
JP2006334727A
Publication Date:
July 18, 2012
Filing Date:
December 12, 2006
Export Citation:
Assignee:
INFINEON TECHNOLOGIES AG
International Classes:
B81B7/02; B81C1/00
Domestic Patent References:
| JP2006331742A | ||||
| JP2006236765A | ||||
| JP2005125447A | ||||
| JP2002222961A | ||||
| JP200028463A | ||||
| JP8330894A | ||||
| JP6176671A |
Attorney, Agent or Firm:
Intellectual Property Office