Title:
MICROELECTROMECHANICAL TRANSVERSE ACCELEROMETER
Document Type and Number:
Japanese Patent JP2005140792
Kind Code:
A
Abstract:
To provide an improved microelectromechanical accelerometer structure.
This microelectromechanical accelerometer 60 having ultramicro shape is made from monocrystal silicon substrate. The accelerometer contains a movable section incorporating an axial beam 102 which bears laterally extending released fingers 110-117, 120-127 with high aspect ratio overhung on the floor of a gap formed within the substrate during manufacturing process. The movable section is supported by reset springs 132, 142 having controllable flexibility in order to change resonant frequency of the structure. Multiple beams structure provides rigidity of the movable section for achieving higher accuracy.
Inventors:
SHAW KEVIN A
ADAMS SCOTT G
MACDONALD NOEL C
ADAMS SCOTT G
MACDONALD NOEL C
Application Number:
JP2004371551A
Publication Date:
June 02, 2005
Filing Date:
December 22, 2004
Export Citation:
Assignee:
CORNELL RES FOUNDATION INC
International Classes:
B60G23/00; B81B3/00; B81C1/00; G01P1/00; G01P15/08; G01P15/125; G01P15/13; H01L29/84; (IPC1-7): G01P15/125; H01L29/84
Attorney, Agent or Firm:
Aoyama Aoi
Osamu Kawamiya
Osamu Kawamiya