To provide an elastomer valve structure capable of being thinned, being operated with small force and being comparatively easily manufactured as compared with a silicon substrate process, and a pumping system using the structure.
A second flow channel 32 laminated by being made orthogonal to a first flow channel 30 is formed within an elastomer block. A film 25 for forming a top part of the first flow channel 30 separates two flow channels, is a top part of the first flow channel 30, and at the same time, forms a bottom part of the second flow channel 32. By fluctuating pressure of the second flow channel 32, the film 25 repeats bending and recovering to a lower side, and thereby the first flow channel 30 constitutes a valve operation system of a linear operation.
CHOU HOU-PU
THORSEN TODD A
SCHERER AXEL
QUAKE STEPHEN R
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