To provide a system to fabricate and actuate microstructure created from various layers adhered by an ON/OFF valve, a switch valve, and a pump.
A method of fabricating an elastomeric structure, comprises : a process where a first micromachined mold has a first raised protrusion which forms a first recess extending along a bottom surface of a first elastomeric layer 20; a process where a second micromachined mold has a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer 22; a process where the bottom surface of the second elastomeric layer 22 is bonded onto a top surface of the first elastomeric layer so that a control channel 32 is formed in the second recess between the first and second elastomeric layers; and a process where the first elastomeric layer 20 on the top of a planar substrate such a flow channel is formed in the first recess between the first elastomeric layer and the planar substrate.
CHOU HOU-PU
THORSEN TODD A
SCHERER AXEL
QUAKE STEPHEN R
LIU JIANN
ADAMS MARK L
HANSEN CARL L
Takaaki Yasumura
Natsuki Morishita
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