Title:
MICROFABRICATION APPARATUS, MICROFABRICATION UNIT, CONTROL APPARATUS, MANUFACTURING METHOD OF ORIGINAL BOARD, AND MICROFABRICATION METHOD OF BASE MATERIAL FOR ORIGINAL BOARD
Document Type and Number:
Japanese Patent JP2019005830
Kind Code:
A
Abstract:
To provide a novel and improved microfabrication apparatus and the like capable of enhancing processing accuracy when cutting a base material for an original board using a plurality of tools.SOLUTION: In order to solve the above problem, according to one aspect of the present invention, there is provided a microfabrication apparatus comprising: a tool installation unit; a first tool fixed to the tool installation unit and capable of forming a fine recessed part on a base material for an original board; a second tool provided in the tool installation unit and capable of forming a fine recessed part on the base material for the original board; a tool adjustment unit capable of adjusting an installation position of the second tool; a displacement measurement unit for measuring a displacement of the second tool; a base drive unit for relatively moving the tool installation unit with respect to the base material for the original board; and a control unit for calculating a relative distance from a point of application of the first tool to a point of application of the second tool based on the displacement of the second tool and controlling the tool adjustment unit to maintain the relative distance at a value within a predetermined range.SELECTED DRAWING: Figure 1
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Inventors:
SHIBATA AKIHIRO
NODA KAZUHIKO
DOI KATSUHIRO
NODA KAZUHIKO
DOI KATSUHIRO
Application Number:
JP2017121722A
Publication Date:
January 17, 2019
Filing Date:
June 21, 2017
Export Citation:
Assignee:
DEXERIALS CORP
International Classes:
B23B29/24; B23B5/48; B23B21/00; B23D1/08; B23Q17/22
Domestic Patent References:
| JPH04256501A | 1992-09-11 | |||
| JPH1015713A | 1998-01-20 | |||
| JP2013143316A | 2013-07-22 | |||
| JP2005537944A | 2005-12-15 |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Kazuki Matsumoto
Tetsuo Kanamoto
Koji Hagiwara
Kazuki Matsumoto