Title:
MICROFABRICATION METHOD
Document Type and Number:
Japanese Patent JP2005262428
Kind Code:
A
Abstract:
To provide a microfabrication method which enables the rapid formation of a microminiaturized structure with high resolution and is environment-friendly in view of environmental conservation because no waste material containing a material that poses problem develops.
A microminiaturized structure is formed on the surface of a substrate, by scanning a probe of a scanning probe microscope so as to abut on or come close to the surface of the substrate, and moving the microminiaturized structure by the cooperation between the microminiaturized structure present on the surface of the substrate and the probe.
Inventors:
MINODA HIROYOSHI
WATABE MANABU
TAKAYANAGI KUNIO
WATABE MANABU
TAKAYANAGI KUNIO
Application Number:
JP2004166030A
Publication Date:
September 29, 2005
Filing Date:
June 03, 2004
Export Citation:
Assignee:
RIKOGAKU SHINKOKAI
International Classes:
B81C99/00; B82B3/00; G01Q30/02; G01Q60/24; G01Q60/38; G01Q70/12; G01Q80/00; (IPC1-7): B82B3/00; B81C5/00; G01N13/10; G01N13/16
Attorney, Agent or Firm:
Isono Dozo
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