Title:
微細加工用工具および脆性材料の微細加工方法
Document Type and Number:
Japanese Patent JP4349384
Kind Code:
B2
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Inventors:
Hiroshi Hayasaki
Application Number:
JP2006165753A
Publication Date:
October 21, 2009
Filing Date:
June 15, 2006
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
B24D7/18; B23B51/00; B24D3/00
Domestic Patent References:
| JP8155947A | ||||
| JP2003205410A | ||||
| JP4005367U | ||||
| JP2000033573A | ||||
| JP10138027A | ||||
| JP6114629A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Yasuhiko Murayama
Noriko Yanai
Tadashi Takahashi
Masakazu Aoyama
Yasuhiko Murayama
Noriko Yanai