Title:
MICROFOCUS ELECTRONIC MICROSCOPE ADAPTER FOR ENLARGED X-RAY IMAGING
Document Type and Number:
Japanese Patent JP2010051769
Kind Code:
A
Abstract:
To use an X-ray generated from the ultra-microfocus of an electronic microscope for enlarged X-ray imaging.
At the position of an ultra-microfocus used in the electronic microscope, a trapezoidal metal target is disposed. Bremsstrahlung generated by hitting an accelerated electron against the target is guided into an adapter disposed in a direction orthogonal to an acceleration cylinder (microscope lens barrel) and is hit to a specimen set in the vicinity of the target. The X-ray transmits the target and an enlarged image is acquired by an X-ray detector set far away from the target. A region and magnification of the specimen to be observed are determined by changing the positions of the focus of irradiated electron beam on the target.
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Inventors:
TANAKA NARIYASU
KOYAMA SHUJI
MAEDA NAOTOSHI
KOYAMA SHUJI
MAEDA NAOTOSHI
Application Number:
JP2008251632A
Publication Date:
March 11, 2010
Filing Date:
August 29, 2008
Export Citation:
Assignee:
MAEDA NAOTOSHI
International Classes:
A61B6/00; G01N23/04; H01J37/252; H05G1/00
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