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Title:
マイクロマシン、およびその作製方法
Document Type and Number:
Japanese Patent JP5095244
Kind Code:
B2
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Inventors:
Mayumi Yamaguchi
Izumi small wave
Application Number:
JP2007062846A
Publication Date:
December 12, 2012
Filing Date:
March 13, 2007
Export Citation:
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Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
B81B7/02; B81B3/00; B81C1/00; H01L21/20; H01L21/336; H01L29/786; H01L29/84
Domestic Patent References:
JP9129896A
JP8064828A
JP9246569A
JP7321339A



 
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