Title:
MICROMACHINE PART FOR MICROMACHINE USING CEMENTITE AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2005297159
Kind Code:
A
Abstract:
To provide a micromachine part for a micromachine of a three-dimensional structure without chemically deteriorating by oxidation.
A combination of a plurality of cementites or a combination of cementite and the other raw material, is constituted in the size and a shape of the cementite selected from a plate-like material having the length of 10 nm to 100 μm and the thickness of 10 nm to 10 μm, a bar-shaped material having the length of 10 nm to 100 μm and a diameter of 10 nm to 10 μm, or a spherical material having a diameter of 10 nm to 10 μm.
More Like This:
| JP2003244971 | ELECTROSTATIC DRIVE UNIT AND OPTICALYSWITCH HAVING THE ELECTROSTATIC DRIVE UNIT |
| WO/2006/058516 | DEVICE FOR GAP ADJUSTMENT |
| JP3852224 | ELECTROSTATIC MICRO RELAY |
Inventors:
Eda, Hiroshi
Shimizu, Atsushi
Shu, Ritsuha
Shimizu, Atsushi
Shu, Ritsuha
Application Number:
JP2004000119961
Publication Date:
October 27, 2005
Filing Date:
April 15, 2004
Export Citation:
Assignee:
EDA HIROSHI
AVEX KK
AVEX KK
International Classes:
B81B5/00; B81C3/00; (IPC1-7): B81B5/00; B81C3/00
